Credit：TMTPost

ASML has applied for an export license for TWINSCAN NXT: 2000i and subsequent immersion lithography systems, and the Dutch government has granted the license necessary for the company starting from September 1, to allow it to continue exports of these machines to China, according to a statement ASML sent to TMTPost on Friday.

Under the new export control rules effective on September 1, ASML is still able to fulfill the contracts signed with customers and ship the abovementioned lithography by the end of 2023, the company said at the statement. It expected export controls would not have material impact on its financial outlook for the year 2023 or beyond. "Our customers are also aware of restrictions due to the export controls, namely, ASML will basically not obtain any export license to deliver these devices to Chinese customers from January 1, 2024," the statement stressed.

ASML’s statement suggests the Netherlands’ export control will have profound impact on China’s semiconductor industry next year since Chinese companies will have no import access to three ASML’s advanced deep ultraviolet (DUV) lithography machine.

TWINSCAN NXT:2000i is one of ASML’s most advanced immersion DUV lithography systems. The system is equipped with an in-line catadioptric lens design, with a numerical aperture (NA) of 1.35, the highest in the industry. It has shown the fastest ramp-to-maturity ever, getting to a reliability of 150 hours in just 2 months, and boasts champion productivity of 4,600 wafers per day, an achievement made possible by providing optional applications that allow the system to optimize scanner wafer processing time and reduce lot overhead for specific use cases, according ASML website.

Reuters reported late June that the United States and the Dutch are set to deliver a one-two punch to China this summer. While the Netherlands announced on June 30 new restrictions on exports of certain equipment from ASML and other companies based in the country, Reuters said U.S. could reportedly introduce new curbs by late July to withhold even more Dutch-made equipments exported to Chinese chipmakers.

China opposes the US’s overstretching the national security concept, abusing export control tools, using all sorts of pretexts to cajole or coerce other countries into joining its technological blockade against China, Chinese Foreign Ministry spokesperson Mao Ning commented on the planning move of the U.S. and Dutch governments. Mao said such actions interfere in normal trade between companies through administrative, which would seriously undermine market rules and the international trade order, disrupt global industrial and supply chains, and serve no one’s interest. China will closely monitor relevant developments and firmly defend our lawful rights and interests, Mao warned.

Days after Mao’s warnings, China unveiled export control on July 3. The export control on shipments of some metals that are used in chipmaking as well as defense, communications and green energy will come into effect on August 1. The move, aiming to protect national security, was deemed as the latest response to U.S.’s increasing efforts for more curbs on China’s high-tech industry.

Gallium-related items such as gallium metal, gallium nitride, gallium oxide, gallium phosphide, etc., and germanium-related items such as germanium metal, zone refined ingots, zinc germanium phosphide and germanium dioxide, shall not be exported without permission from August 1, according to an announcement of the Ministry of Commerce.

Chinese Foreign Ministry spokesperson Wang Wenbin stressed the export control is “completely legitimate and justified” and it is not used to target any specific country. He pointed out industrial products and materials containing gallium and germanium apparently can be used for both military and civilian purposes, and EU members have also imposed export control over relevant products and materials.

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